Surface topography measurement of microstructures in 3D using an optical profiler. Take a measurement and compare the roughness, Ra, surface roughness (Sa), step heights and peak-to-valley stats of one feature to another in the same data.
Strong three dimensional presentation tools make it easy to look at co-planarity of multiple locations or average height compared to another area.
After watching this video, be sure to watch Part 2: Walkthrough, by clicking this link: www.zygo.com/ra2