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Weißlicht-Interferometer zur Nanometer-Abstandsmessung

  Рет қаралды 973

Micro-Epsilon Messtechnik

Micro-Epsilon Messtechnik

2 жыл бұрын

Anders als herkömmliche Interferometer ermöglicht das IMS5400-DS von Micro-Epsilon die stabile Messung von Profilen ohne Signalabriss. Dieses Video zeigt einen hochauflösenden XY-Scan eines Wafers. Dabei werden Höhenunterschiede von Absätzen, Stufen und Vertiefungen im Submikrometerbereich zuverlässig erfasst.

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