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Resistivity and conductivity type are fundamental properties of semiconductors and are critical parameters in both materials research and wafer fabrication.The resistivity can affect a device's series resistance, threshold voltage, capacitance, and other parameters. Measuring a semiconductor material's resistivity is one of the most common electrical tests. four-point collinear probe and the appropriate test equipment can be used to determine both resistivity and conductivity type.
The four-point, or Kelvin, probe method is the most common way to measure a semiconductor material's resistivity. Two of the probes are used to source current and the other two probes are used to measure voltage. Using four probes eliminates measurement errors due to the probe resistance, the spreading resistance under each probe, and the contact resistance between each metal probe and the semiconductor material. This technique involves bringing four equally spaced probes into contact with the material of unknown resistance.